Coating apparatus – Gas or vapor deposition
Patent
2000-02-10
2000-12-05
Bueker, Richard
Coating apparatus
Gas or vapor deposition
C23C 1600
Patent
active
061561231
ABSTRACT:
In a method for coating workpieces with a coating material by a gas phase diffusion coating process, the coating material is conveyed in the form of a metal halide compound from a coating material source (9A, 9B, 9C) to the workpiece (7) by means of a metal halide gas circulation flow (F). The gas circulation flow (F) is physically induced due to convection by establishing a temperature gradient between the workpiece (7) and the coating material source (9A, 9B, 9C), and is reinforced by the chemical reactions taking place. An apparatus for carrying out a gas phase diffusion process includes a reaction vessel (3) enclosing a reaction chamber (1) in which the workpiece (7) is arranged. The apparatus further includes a metal halide generator (9A, 9B, 9C) arranged in the reaction chamber (1), and a heater (5) as well as a cooling device (6) and a thermal conduction arrangement (8) for establishing a temperature gradient between the workpiece (7) and the metal halide generator (9A, 9B, 9C). The method and apparatus produce a diffusion coating having a uniform thickness and a high quality smooth surface, even on large workpiece surfaces.
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Pillhoefer Horst
Thoma Martin
Bueker Richard
Fasse W. F.
Fasse W. G.
MTU Motoren-und Turbinen-Union Muenchen GmbH
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