Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating moving substrate
Reexamination Certificate
2005-02-08
2005-02-08
Nicolas, Wesley A. (Department: 1742)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating moving substrate
C205S149000, C205S157000, C205S103000, C205S652000, C205S654000, C205S662000, C205S663000, C205S686000, C204S22400M, C204S22400M, C204S279000, C204S228300
Reexamination Certificate
active
06852208
ABSTRACT:
Deposition of conductive material on or removal of conductive material from a workpiece frontal side of a semiconductor workpiece is performed by providing an anode having an anode area which is to face the workpiece frontal side, and electrically connecting the workpiece frontal side with at least one electrical contact, outside of the anode area, by pushing the electrical contact and the workpiece frontal side into proximity with each other. A potential is applied between the anode and the electrical contact, and the workpiece is moved with respect to the anode and the electrical contact. Full-face electroplating or electropolishing over the workpiece frontal side surface, in its entirety, is thus permitted.
REFERENCES:
patent: 6482307 (2002-11-01), Ashjaee et al.
patent: 6497800 (2002-12-01), Talieh et al.
patent: 6527925 (2003-03-01), Batz et al.
Ashjaee Jalal
Basol Bulent M.
Nagorski Boguslaw
Talieh Homayoun
Uzoh Cyprian
Nicolas Wesley A.
NuTool Inc.
NuTool Legal Department
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