Method and apparatus for forming thin film oxide layers using re

Details Method and apparatus for forming thin film oxide layers using re Method and apparatus for forming thin film oxide layers using re

1981-05-04

1982-11-30

Page, Thurman K.

Coating apparatus

Gas or vapor deposition

With treating means

118726, 204 39, 204164, 219121EB, 427 38, 427 39, 427 451, 427124, 4271263, 427163, 427164, C23C 1308, B05D 306

Patent

active

043611141

ABSTRACT:
Apparatus and method for forming high quality thin film oxide layers on a substrate by a reactive evaporation process utilizing an oxygen plasma activation source in the form of a cylindrical boule of insulating material surrounded by a radio frequency coil for generating a radio frequency electromagnetic field in the boule of sufficient magnitude to create a self-igniting oxygen plasma within the boule without evaporating material from the walls thereof.

REFERENCES:
patent: 3886896 (1975-06-01), Van Cakenberghe
patent: 4015558 (1977-04-01), Small et al.
patent: 4112137 (1978-09-01), Zega
patent: 4125086 (1978-11-01), Vig et al.
patent: 4268711 (1981-05-01), Gurev

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