Method and apparatus for forming tapered waveguide structures

Details Method and apparatus for forming tapered waveguide structures Method and apparatus for forming tapered waveguide structures

2006-03-28

2006-03-28

Kuhns, Allan R. (Department: 1732)

Plastic and nonmetallic article shaping or treating: processes

With step of making mold or mold shaping, per se

C216S002000, C216S024000, C264S001240

Reexamination Certificate

active

07018580

ABSTRACT:
A method of fabricating a stamping mold suitable for use in the formation of a tapered waveguide structure includes defining a stamping pattern upon the surface of a silicon wafer, and removing portions of the silicon wafer surface in accordance with the stamped pattern, thereby creating tapered vertical surfaces within the wafer.

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