Method and apparatus for forming required gas atmosphere

Details Method and apparatus for forming required gas atmosphere Method and apparatus for forming required gas atmosphere

2005-04-19

2005-04-19

Zervigon, Rudy (Department: 1763)

Coating apparatus

Gas or vapor deposition

C118S728000, C118S050000, C156S345290, C156S345330, C096S234000, C096S243000, C055S355000

Reexamination Certificate

active

06881268

ABSTRACT:
The present apparatus includes a casing (1) having a gas introduction opening (3) for introducing a gas into the casing and a gas discharge opening (5) for discharging the gas from the casing, a gas circulating tube passage (8) communicating with the casing for effecting circulation of the gas, a circulating fan (11) for effecting circulation of the gas in the casing through the gas circulating tube passage, and a valve (6, 7) switchable between a position for conducting the introducing and discharging of the gas into and from the casing through the gas introduction opening and the gas discharge opening and a position for effecting circulation of the gas in the casing through the gas circulating tube passage. The apparatus further includes a trap (10), a filter (4) and a heat exchanger (9) for conducting a desired treatment with respect to the circulated gas, such as removal of particles.

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