Method and apparatus for forming oxide coating by reactive sputt

Details Method and apparatus for forming oxide coating by reactive sputt Method and apparatus for forming oxide coating by reactive sputt

1982-03-31

1983-10-04

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, C23C 1500

Patent

active

044077092

ABSTRACT:
A method for forming a coating of an oxide on a support by the reactive sputtering technique, which comprises measuring the intensity of at least one spectral component having a given wavelength of the spectrum of a plasma formed between the support and a target composed of an oxidizable substance convertible to said oxide, comparing the measured intensity of the spectral component with the standard intensity of a spectral component of the same wavelength, and continuously or intermittently varying the physical amount of a sputtering gas and/or the amount of an electric current from a sputtering power supply so that the measured intensity of the former spectral component approaches the standard intensity of the latter spectral component; and a sputtering apparatus for performing the aforesaid method, which comprises a vacuum chamber, a target electrode disposed within the vacuum chamber, means for introducing a sputtering gas into the vacuum chamber, means for discharging the sputtering gas from the vacuum chamber, and a power supply for applying a negative voltage, an optical spectroscopic instrument for measuring the intensity of at least one component having a given wavelength of the spectrum of a plasma formed on the surface of the target electrodfe, and control circuit means for comparing the measured intensity of the spectral component with the standard intensity of a spectral component having the same wavelength.

REFERENCES:
patent: 3738926 (1973-06-01), Westwood et al.
patent: 4036167 (1977-07-01), Lu
patent: 4289188 (1981-09-01), Mizutani
Harshbarger et al., J. Electronic Mat. 7(1978), pp. 429-440.
Westwood, J. Appl. Phys. 44(1973), p. 2619-2626.
Westwood et al., J. Appl. Phys. 44(1973), pp. 2610-2618.
Ratinen, J. Applied Phys. 44(1973), pp. 2730-2734.
Greene et al., J. Applied Phys. 44(1973), pp. 2509-2513.
Greene et al., J. Vac. Sci. Technol. 10(1973), pp. 1144-1150.

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