Method and apparatus for forming carbon nanotube array

Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon

Reexamination Certificate

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C423S447100, C422S198000, C977S742000, C977S843000

Reexamination Certificate

active

08057778

ABSTRACT:
The present disclosure relates to a method for forming a carbon nanotube array. In the method a tubular substrate is provided. The tubular substrate includes an outer sidewall with a catalyst layer located on the outer sidewall. The heating member, and the tubular substrate with the catalyst layer is received in a reacting chamber. The tubular substrate is heated by the heating member. A carbon source gas is supplied into the reacting chamber to grow the carbon nanotube array on the tubular substrate.

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patent: 7045108 (2006-05-01), Jiang et al.
patent: 2004/0151835 (2004-08-01), Croci et al.
patent: 2005/0170089 (2005-08-01), Lashmore et al.
patent: 2007/0292614 (2007-12-01), Liu et al.
patent: 2008/0152554 (2008-06-01), Kim et al.
patent: 2008/0248235 (2008-10-01), Feng et al.

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