Method and apparatus for forming a thin-film solar cell...

Details Method and apparatus for forming a thin-film solar cell... Method and apparatus for forming a thin-film solar cell...

2005-11-10

2009-08-18

Malsawma, Lex (Department: 2892)

Semiconductor device manufacturing: process

Miscellaneous

C118S719000, C118S7230VE

Reexamination Certificate

active

07576017

ABSTRACT:
The present invention relates to new methods for manufacturing photovoltaic devices and an apparatus for practicing those methods of manufacture. The present invention employs a transfer-through system for advancing work piece substrates through an integrated apparatus of multiple treatment chambers that control each of the manufacturing processes.

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