Method and apparatus for forming a semiconductor boule

Details Method and apparatus for forming a semiconductor boule Method and apparatus for forming a semiconductor boule

1994-12-01

1995-12-05

Kunemund, Robert

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth from liquid or supercritical state

Havin growth from molten state

117 3, 117 83, C30B 1102

Patent

active

054719453

ABSTRACT:
A method of manufacturing a semiconductor boule, the method comprises providing a chamber having a crucible, introducing a material for forming the boule and a liquid encapsulant having a softening point into the crucible, heating the crucible to melt the material, cooling the material to grow a boule, and separating the grown boule from the crucible at a temperature higher than the softening point of the encapsulant. An apparatus for manufacturing a semiconductor boule which comprises a chamber; a crucible for containing a seed crystal, a starting material, and a liquid encapsulant; a crucible shaft for holding the crucible; and a seed crystal shaft for holding the seed crystal and the boule formed by the seed crystal and starting material, the seed crystal shaft being elevated and rotated independently of the crucible shaft.

REFERENCES:
patent: 4946542 (1990-08-01), Clemans
patent: 5064497 (1991-11-01), Clemans et al.
patent: 5131975 (1992-07-01), Barret-Courchesne
patent: 5252175 (1993-10-01), Bachowski et al.

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