Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate
2005-01-04
2005-01-04
Vinh, Lan (Department: 1765)
Semiconductor device manufacturing: process
Chemical etching
Combined with the removal of material by nonchemical means
C438S692000, C438S693000, C451S041000, C216S088000
Reexamination Certificate
active
06838382
ABSTRACT:
A planarizing pad for planarzing a microelectronic substrate, and a method and apparatus for forming the planarizing pad. In one embodiment, planarzing pad material is mixed with compressed gas to form a plurality of discrete elements that are distributed on a film support material. The film support material is supported by a liquid and is drawn from the liquid with a backing layer. At least a portion of the discrete elements are spaced apart from each other on the film support material to form a textured surface for engaging a microelectronic substrate and removing material from the microelectronic substrate. The discrete elements can be uniformly or randomly distributed on the film support material.
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Micro)n Technology, Inc.
Perkins Coie LLP
Vinh Lan
LandOfFree
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