Method and apparatus for fluid processing a workpiece

Details Method and apparatus for fluid processing a workpiece Method and apparatus for fluid processing a workpiece

2004-10-22

2008-11-04

Edwards, Laura (Department: 1792)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S298110, C204S298150, C118S500000, C118S504000, C118S505000, C269S037000, C269S043000, C269S287000

Reexamination Certificate

active

07445697

ABSTRACT:
A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.

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