Method and apparatus for feeding drug liquid from hermetic retur

Details Method and apparatus for feeding drug liquid from hermetic retur Method and apparatus for feeding drug liquid from hermetic retur

1984-10-12

1987-06-30

Skaggs, H. Grant

Dispensing

Automatic control

Delivery from source controlled by quantity in discharging...

222 61, 222 66, 222399, 137208, 137209, 137212, B67D 500

Patent

active

046764046

ABSTRACT:
An apparatus for feeding a variety of doping liquid used in doping-liquid treatment processes for electronic materials such as semiconductors and precision machinery components, and a feeding monitor apparatus. More specifically, it relates to an apparatus for stably feeding the doping liquid while detecting its volume, in the case where the doping liquid is fed from a liquid-filled hermetic returnable can to the doping liquid treatment process, and a feeding monitor apparatus is connected between the returnable can and treatment process.

REFERENCES:
patent: 1733106 (1929-10-01), Cannon
patent: 3535124 (1970-10-01), Cornelius
patent: 3612090 (1971-10-01), Kassel
patent: 3804297 (1974-04-01), Jurjans
patent: 3805819 (1974-04-01), Etter
patent: 3878970 (1975-04-01), Nezworski
patent: 3909205 (1975-09-01), Jones
patent: 4370356 (1983-01-01), Bok et al.
patent: 4377246 (1983-03-01), McMillin et al.
patent: 4545801 (1985-10-01), Miyajiri et al.

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