Method and apparatus for fast disturbance detection and...

Details Method and apparatus for fast disturbance detection and... Method and apparatus for fast disturbance detection and...

2007-11-20

2007-11-20

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Statistical measurement

C702S182000, C702S185000

Reexamination Certificate

active

11130459

ABSTRACT:
The present invention provides a method and apparatus for detecting step and impulse disturbances. The method includes determining a pattern based on a plurality of probabilities associated with a corresponding plurality of wafer processing parameters and determining a type of a disturbance based upon the pattern.

REFERENCES:
patent: 5886906 (1999-03-01), Tatsumi et al.
patent: 6466895 (2002-10-01), Harvey et al.
patent: 6563300 (2003-05-01), Jackson et al.
patent: 6890773 (2005-05-01), Stewart
patent: 6988017 (2006-01-01), Pasadyn et al.
patent: 2005/0171626 (2005-08-01), Schwarm

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