Method and apparatus for fabrication of passivated...

Details Method and apparatus for fabrication of passivated... Method and apparatus for fabrication of passivated...

2004-10-28

2008-11-04

Lewis, Monica (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257S499000

Reexamination Certificate

active

07446382

ABSTRACT:
A method and apparatus for fabrication of passivated microfluidic structures is disclosed. The method includes providing a substrate having a microfluidic structure formed therein. The microfluidic structure is embedded by an embedding layer. The method further includes passivating the embedded microfluidic structure by locally heating the microfluidic structure surface in a reactive atmosphere, wherein the passivated microfluidic structure is suitable for transporting a fluid. The structure optionally further includes metal pads to form an electrokinetic pump.

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