Method and apparatus for fabricating high temperature...

Coating processes – Electrical product produced – Superconductor

Reexamination Certificate

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C427S526000, C427S529000, C427S530000, C427S531000, C427S562000, C427S564000, C427S569000, C427S585000, C505S320000, C505S473000, C505S477000

Reexamination Certificate

active

07838061

ABSTRACT:
Disclosed herein is a method of fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a housing, and the formed gas atoms pass through a nozzle of an inlet of the housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.

REFERENCES:
patent: 3615881 (1971-10-01), Greene
patent: 4882023 (1989-11-01), Wendman
patent: 5079224 (1992-01-01), Higuchi
patent: 5284824 (1994-02-01), Noda et al.
patent: 5907780 (1999-05-01), Gilmer et al.
patent: 6209190 (2001-04-01), Chung et al.
patent: 6676811 (2004-01-01), Barnes et al.
patent: 63-245828 (1988-10-01), None
patent: 01-061916 (1989-06-01), None
patent: 03-199107 (1991-08-01), None

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