Method and apparatus for fabricating electroluminescent device

Coating processes – Electrical product produced – Fluorescent or phosphorescent base coating

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427 69, 427109, 427124, 427252, 42725515, 42725528, B05D 512, C23C 1600

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06004618&

ABSTRACT:
Fabrication of an electroluminescent device having a high-quality luminescent layer is disclosed. The device emits intense blue light. A first electrode layer, a first dielectric layer, the luminescent layer, a second dielectric layer, and a second electrode layer are successively formed on a glass substrate. At least the exit side of the device is made from an optically transparent material. A first gaseous source material of a group II element belonging to group II of the periodic table, a second gaseous source material of a group VIB element belonging to group VIB, and a third gaseous source material of an element forming the luminescent center of the luminescent layer are supplied into a reaction furnace through first, second, and third gas supply tubes, respectively, and caused to react with each other. Thus, the luminescent layer is formed by chemical vapor deposition. The first material acts as a base material from which the luminescent layer is formed. The first tube for the first material is laid in the center of the furnace. The third tube for the third material forming the luminescent center is laid around the first gas supply tube. The second tube is laid around the third tube.

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Barrow, et al: "A New Class of Blue TFEL Phosphors with Application to VGA Full-Color Display", SID no month available 93 Digest, pp. 761-764.
Soininen, et al: "Blue electroluminescence of SrS:Ce, SoCl.sub.4 thin films frown by Atomic Layer Epitaxy", Euro Display no month available '93, Conference Proceedings, The 13th International Display Research Conf.SID Society:pp. 511-514.

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