Method and apparatus for fabricating a thin-film solar cell...

Batteries: thermoelectric and photoelectric – Photoelectric – Cells

Reexamination Certificate

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C136S261000, C136S255000, C136S249000, C438S096000, C438S074000, C257S431000, C257S458000, C427S074000, C427S588000, C427S593000

Reexamination Certificate

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07122736

ABSTRACT:
A thin-film solar cell is provided. The thin-film solar cell comprises an a-SiGe:H (1.6 eV) n-i-p solar cell having a deposition rate of at least ten (10) Å/second for the a-SiGe:H intrinsic layer by hot wire chemical vapor deposition. A method for fabricating a thin film solar cell is also provided. The method comprises depositing a n-i-p layer at a deposition rate of at least ten (10) Å/second for the a-SiGe:H intrinsic layer.

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