Coating apparatus – Projection or spray type – Rotating work
Reexamination Certificate
2008-04-29
2008-04-29
Lamb, Brenda A. (Department: 1792)
Coating apparatus
Projection or spray type
Rotating work
C118S066000, C118S323000
Reexamination Certificate
active
10382576
ABSTRACT:
The invention provides an apparatus for fabricating a device, in which a high operation efficiency is maintained in a drying treatment for a multilayer-interconnection device. The device can also be fabricated inexpensively. An apparatus for fabricating a device has an inkjet unit that can dispose a liquid material on a substrate, and a preparatory dryer to blow a gas heated at a predetermined temperature to the substrate.
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Hasei Hironori
Hirai Toshimitsu
Lamb Brenda A.
Oliff & Berridg,e PLC
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