Method and apparatus for evaporation arc stabilization for non-p

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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118715, 118722, 118723, 204192E, 204298, 219123, 313157, 315187, 315118, 427 42, C23C 1500

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active

046004890

ABSTRACT:
Apparatus and method for evaporation arc stabilization including a target having a surface of material of non-permeable material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface.

REFERENCES:
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patent: 3625848 (1971-12-01), Snaper
patent: 3730873 (1973-05-01), Pompei et al.
patent: 3783231 (1974-01-01), Sablev et al.
patent: 3793179 (1974-02-01), Sablev et al.
patent: 3836451 (1974-09-01), Snaper
patent: 4405435 (1983-09-01), Tateishi et al.
patent: 4430184 (1984-02-01), Mularie et al.
patent: 4448659 (1984-05-01), Morrison
"Vacuum-Arc Evaporation of Ferrites and Compositions of Their Deposit", Japanese Journal of Applied Physics, vol. 10, No. 6, Jun. 1971, Masahiko Naoe and Shunichi Yamanaka.
Soviet Inventions Illustrated, vol. 37, Oct. 24, 1979, Derwent Publications, B. G. Goldiner.

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