Method and apparatus for evaporating materials in a vacuum coati

Details Method and apparatus for evaporating materials in a vacuum coati Method and apparatus for evaporating materials in a vacuum coati

1978-05-26

1980-04-08

Rutledge, L. Dewayne

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192N, 204298, 118719, 118723, 118726, 427 38, C23C 1312, C23C 1500

Patent

active

041971752

ABSTRACT:
A method and apparatus for evaporating materials in a vacuum evaporator by bombarding a material to be evaporated with electrons generated by a low voltage arc discharge sustained between a hot cathode and an anode comprising, locating the hot cathode in a chamber which is separated from an evaporation chamber wherein the hot cathode chamber communicates with the evaporation chamber through an aperture, connecting the material to be evaporated as the anode in the evaporation chamber, continuously introducing a gas into the hot cathode chamber while evacuating the evaporation chamber to maintain a pressure differential therebetween, and concentrating the beam of electrons by a magnetic field so as to obtain on the surface of the anode a power density sufficient for evaporation.

REFERENCES:
patent: 3839182 (1974-10-01), Sager
patent: 3895602 (1975-07-01), Bobenrieth
patent: 3984581 (1976-10-01), Dobler et al.
patent: 4112137 (1978-09-01), Zega

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