Method and apparatus for evaporating material under vacuum using

Details Method and apparatus for evaporating material under vacuum using Method and apparatus for evaporating material under vacuum using

1982-03-12

1984-05-15

Smith, John D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

4272481, 427 38, 118726, 118723, 118 501, 373 1, 373 10, 219121EF, 219121EG, 219121ES, 219121EM, 219121PA, 219121PB, 219121PY, C23C 1300, C23C 1312

Patent

active

044488025

ABSTRACT:
A method of evaporating an evaporative substance under vacuum comprises bombarding the evaporative substance with electrons from a low voltage arc discharge established between a cathode and an anode which is located in an evaporation chamber and simultaneously supplying additional power for evaporation to the evaporative substance by means of an electron gun which produces an electron energy in excess of one keV. A device for carrying out the invention comprises an evacuable bowl, an evaporation chamber with a receptacle therein for a substance to be evaporated and means for establishing a low voltage arc discharge between a cathode and an anode located in the evaporation chamber, a further provision of an electron gun for bombarding the substance with electrons which has an electron energy more than one kilovolt.

REFERENCES:
patent: 4061871 (1977-12-01), Sommerkamp et al.
patent: 4197175 (1980-04-01), Moll et al.
Korobov et al. "An Electron Beam Evaporator Fitted to A UVM-2ME Equipment" Instruments and Experimental Techniques, vol. 17, No. 6, pt. 2, p. 1794, NY, May 1975.

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