Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1988-11-01
1990-04-17
Nguyen, Nam X.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
20429841, 427 37, 118723, C23C 1422, B05D 314
Patent
active
049177869
ABSTRACT:
A method for evaporating materials in a vacuum chamber by heating a material to be evaporated by the impact of electrons generated in a vacuum arc discharge ignited and sustained between a cold cathode and an anode, comprises the steps of locating the cathode and the anode in a vacuum chamber, connecting the material to be evaporated to at least a part of the anode in the evaporation chamber, generating electrons for a self-sustained discharge in the cathode spots on the cold cathode-surface, bombarding the anode with electrons generated in the arc discharge to obtain on the surface of the anode a power input sufficient for the evaporation of the material, and maintaining the arc discharge essentially in the vapor of the material evaporated at the anode. An apparatus for performing the method includes a vacuum evaporation chamber, in which the cold cathode and the anode, both provided with cooling means are positioned opposite to each other and the material to be evaporated is provided at the end of the anode, facing the cathode.
REFERENCES:
A. M. Dorodnov et al., "New Anode-Vapor Vacuum Arc with Permanent Hollow Cathode", Sov. Phys. Letters 5 (8) (1979).
A. M. Dorodnov et al., "Physical Principles and Types of Technological Vacuum Plasma Devices", Sov. Phys. Techn. Phys. 26 (3) (1981).
Vasin et al., "Vacuum Arc with a Distributed Discharge on an Expendable Cathode", Sov. Tech. Phys. Lett. 5(12), (1979).
Gebaur, "Investigations to the Electrode Erosion in Vacuum in the Transition Region between the Both Typical Kinds of Vacuum Arcs", Proc. Eighth Int. Conf. Electr. Contact Phen. 1976, p. 183.
Klapas et al, "Anode Spot Temperatures in Vacuum Arcs", Eleventh International Conference on Phenomena in Ionized Gases, 1973, Praque, Czechoslovakia, Sep. 1973, p. 82.
E. Gebauer, "Phenomena at the Electrodes of an Arc Discharge in the Pressure Range 10.sup.-6 to 760 Torr", Elektrie, vol. 28, pp. 473-475, 1974.
Miller, "Vacuum Arc Anode Phenomena", IEEE Transactions on Plasma Science, vol. ps-5, No. 3, Sep. 1977, p. 181.
Kimblin, "Anode Voltage Drop and Anode Sport Formation in DC Vacuum Arcs", J. Appl. Phys., vol. 40, No. 4, Mar. 1969, p. 1744.
Kutzner, "Voltage-Current Characteristics of a Diffusion Vacuum Arc", Physics, 104E (1981), p. 116.
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