Method and apparatus for evaporating a liquid organic metal

Details Method and apparatus for evaporating a liquid organic metal Method and apparatus for evaporating a liquid organic metal

1984-11-15

1986-05-27

Miles, Tim

Gas and liquid contact apparatus

With external supply or removal of heat

Heat exchange means at or downstream of contact zone

261121R, B01F 304

Patent

active

045914648

ABSTRACT:
A bubbling evaporator comprises: a vessel (11); a partition plate (11a) for dividing the vessel (11) into an upper chamber (11b) for temporarily storing carrier gas and a lower chamber (11c) for containing liquid (2); an inlet pipe (12 or 14) for making the carrier gas blow from the upper chamber (11b) into the liquid (2) in the lower chamber (11c) through the partition plate (11a) to bubble and evaporate the liquid (2); and an outlet pipe (13) for leading the evaporated vapor together with the carrier gas to the exterior of the vessel (11). Thus, backflow of the liquid (2) to the exterior of the vessel (11) can be prevented and stable pressure of the evaporated vapor can be obtained. A method of evaporating a liquid organic metal to be used in a vapor deposition process for manufacturing semiconductor devices and the like is also disclosed.

REFERENCES:
patent: 1530882 (1925-03-01), Chapin
patent: 3306835 (1967-02-01), Magnus
patent: 3735568 (1973-05-01), Beck
patent: 4419331 (1983-12-01), Montalvo
Alfa Products, "Organometallics for Vapor Phase Epitaxy", p. 39, 1983, Alpha Products, 152 Andover St., Danvers, Mass. 01923.
Samuelson et al., "Electrical and Optical Properties of Deep Levels in MOVPE Grown GaAs", Journal of Crystal Growth, 1981, pp. 164-172.

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