Method and apparatus for evaluating the layers

Details Method and apparatus for evaluating the layers Method and apparatus for evaluating the layers

1996-08-07

1999-02-02

Nguyen, Nam

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

25055928, 356381, 356382, 430 30, G01V 800

Patent

active

058669175

ABSTRACT:
Light is led from a light source to the surface of a detecting area on an intermediate product by way of a route of an optical fiber and a probe. After reaching the detecting area, light successively passes through the layers formed on a conductive substrate of the intermediate product, and is reflected on the surface of the conductive substrate. The reflected light reversely travels through the layers and a reverse route of the probe and the optical fiber, and reaches a spectrophotometer. A spectral absorption ratio calculating unit in a film-thickness calculating section calculates spectral absorption ratios from a spectrum produced by the spectrophotometer. A thickness converting unit substitutes the spectral absorption ratios into a multiple regression equation that is read out of a multiple regression memory, and produces the film thickness or the characteristic value dependent on the film thickness.

REFERENCES:
patent: 4555767 (1985-11-01), Case et al.
patent: 4666305 (1987-05-01), Mochida et al.
patent: 5048960 (1991-09-01), Hayashi et al.
patent: 5403688 (1995-04-01), Ashiya et al.

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