Method and apparatus for evaluating the capacitance of an integr

Details Method and apparatus for evaluating the capacitance of an integr Method and apparatus for evaluating the capacitance of an integr

1990-10-03

1992-03-17

Wieder, Kenneth A.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, 324 731, 324678, 250310, G01R 1702, G01R 3126

Patent

active

050972049

ABSTRACT:
A method and apparatus for testing an integrated electronic device wherein the integrated electronic device to be tested is placed on a sample table. A predetermined position of the integrated electronic device is irradiated with the primary charged beam. A substrate current flowing through a substrate of the integrated electronic device is measured upon radiation of the primary charged beam, and then a potential of the predetermined position irradiated with the primary charged beam is nondestructively measured in accordance with secondary electrons emitted from the predetermined position. A function of the integrated electronic device is evaluated in accordance with the substrate current and the predetermined position potential. The function to be evaluated includes leakage characteristics and a capacitance.

REFERENCES:
patent: 3995216 (1976-11-01), Yun
patent: 4460866 (1984-07-01), Feuerbaum et al.
patent: 4695794 (1987-09-01), Bargett et al.
patent: 4788495 (1988-11-01), Plies
patent: 4851768 (1989-07-01), Yoshizawa et al.
Feuerbaum; "VLSI Testing Using the Electron Probe"; Scanning Electron Microscopy 1979; pp. 285-296.
Menzel et al.; "Secondary Electron Detection Systems for Quantitative Voltage Measurements"; Scanning vol. 5, 4 (1983).

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