Electricity: measuring and testing – Testing potential in specific environment – Voltage probe
Patent
1992-11-03
1994-12-27
Regan, Maura K.
Electricity: measuring and testing
Testing potential in specific environment
Voltage probe
324456, 3241581, G01N 2760, G01R 3126
Patent
active
053768795
ABSTRACT:
A system evaluates occurrences of low level electrostatic discharge events in a manufacturing or processing environment or the like by encapsulating each of a plurality of a MOSFETs in a corresponding package having conductive first and second groups of leads coupled to the gate and source and/or drain electrodes of the MOSFET, respectively. The encapsulated MOSFET then is moved through the environment, wherein an electrostatic discharge causes current to flow into the first external electrode, stressing the gate oxide of the MOSFET and producing a permanent low resistance condition therein. The encapsulated MOSFET then is removed from the environment and tested by measuring an electrical parameter indicative of the low resistance condition between the first and second electrodes of the MOSFET. A statistical analysis then is performed on the data obtained by testing all of the MOSFETs to determine how to reduce or avoid ESD in the environment.
REFERENCES:
patent: H330 (1987-09-01), Burich et al.
patent: 4425544 (1984-01-01), Barth
patent: 4567430 (1986-01-01), Carr
patent: 4760632 (1988-07-01), Turner
patent: 4801869 (1989-01-01), Sprogis
patent: 4823088 (1989-04-01), Fukuda
patent: 4970454 (1990-11-01), Stambaugh et al.
patent: 4972144 (1990-11-01), Lyon et al.
"Novel Test Structure for the Measurement of Electrostatic Discharge Pulses", by Lendenmann, Schrimpf and Bridges, IEEE Transactions on Semiconductor Manufacturing, vol. 4, No. 3, Aug. 1991, pp. 213-218.
"Zero Introduces Multiple ESD Sensor Sensitivities at NEPCON West", Contact: Jonathan P. Deex, Zero Static Systems News Release, Feb. 25, 1991, 2 pages.
Lee Sung-chul
Schrimpf Ronald D.
QRP, Incorporated
Regan Maura K.
LandOfFree
Method and apparatus for evaluating electrostatic discharge cond does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for evaluating electrostatic discharge cond, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for evaluating electrostatic discharge cond will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-921311