Pumps – Condition responsive control of pump drive motor – Plural pumps having separate drive motors – supply sources,...
Patent
1995-06-06
1998-05-05
Thorpe, Timothy
Pumps
Condition responsive control of pump drive motor
Plural pumps having separate drive motors, supply sources,...
417 42, 417 43, 417 442, 417 53, F04B 4106, F04B 4900
Patent
active
057465819
ABSTRACT:
A method and apparatus for evacuating a vacuum system which includes an evacuating portion comprising first and second vacuum pumps which are connected in series. The method and the apparatus are characterized in that the first vacuum pump is operated in a range from reverse rotation to forward rotation, and the second vacuum pump is rotated unidirectionally, thereby enabling pressure control of the vacuum system over a wide range.
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Ando Yoshio
Mikata Yuuichi
Okumura Katsuya
Tsujimura Manabu
Ebara Corporation
Kabushiki Kaisha Toshiba
Korytnyk Peter G.
Thorpe Timothy
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