Method and apparatus for etching round templates

Details Method and apparatus for etching round templates Method and apparatus for etching round templates

1994-07-06

1995-08-22

Le, Hoa Van

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

B44C 122

Patent

active

054436761

ABSTRACT:
By means of a laser beam, a lacquer layer lying on the surface of a hollow, cylindrical, rotating metal screen is eroded in predetermined pattern regions. The erosion of the lacquer layer within the pattern region takes place with the laser beam continuously energized. The laser beam is deenergized at the end of each respective pattern region within a time interval of 12 .mu.s to 30 .mu.s. Radiation reflected back at the metal screen into the laser beam path is coupled out from the laser beam path, in order not to delay the deenergization of the laser beam. As a result, patterns with particularly sharp edge structures may be generated.

REFERENCES:
patent: 4389275 (1983-06-01), Ballato
patent: 4454001 (1984-06-01), Sternheim et al.
patent: 4478677 (1984-10-01), Chen et al.
patent: 4624736 (1986-11-01), Gee et al.

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