Method and apparatus for enhancing image contrast using...

Details Method and apparatus for enhancing image contrast using... Method and apparatus for enhancing image contrast using...

2006-04-25

2006-04-25

Duda, Kathleen (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Screen other than for cathode-ray tube

C430S311000, C430S396000

Reexamination Certificate

active

07033710

ABSTRACT:
An intensity filter for deep UV lithography enhances contrast and also therefore increases the resolution of patterned images by passing only intensities that fall within a specific minimum threshold value, resulting in a more exact aerial image replicating the mask image. This device is a different approach to contrast enhancement that is distinguished from previous methods by eliminating the need for an extra layer of contrast enhancement on top of the resist, thereby reducing the number of processing steps in semiconductor fabrication.

REFERENCES:
patent: 5863712 (1999-01-01), Von Bunau et al.

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