Method and apparatus for enhanced resolution of high spatial...

Details Method and apparatus for enhanced resolution of high spatial... Method and apparatus for enhanced resolution of high spatial...

2007-12-25

2007-12-25

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

10954625

ABSTRACT:
A method of measuring properties of a substrate, the method involving: illuminating a spot on the substrate with a standing wave measurement beam to generate a return measurement beam, the standing wave measurement beam characterized by a standing wave pattern; generating an electrical signal from the return measurement beam; causing the standing wave pattern to be at a succession of different positions on the surface of the substrate; and for each of the succession of different positions of the standing wave pattern, acquiring measurement data from the electrical signal.

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