Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2005-12-08
2009-10-06
Young, Christopher G (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S022000, C430S030000, C716S030000, C716S030000
Reexamination Certificate
active
07598006
ABSTRACT:
A method and apparatus for embedded encoding of overlay data ordering in an in-situ interferometer is described. An in-situ interferometer is encoded, or augmented, with special or missing alignment attributes at desired positions. Exposing a sequence of the encoded in-situ interferometer onto a silicon wafer coated with a suitable recording media. Then measuring the alignment attributes. The encoded overlay data is processed to verify the proper order and physical location of each overlay measurement. The data is collected without increasing the overall number of required overlay measurements required. Collection of overlay data allows for the proper reconstruction of the aberrated wavefront. Non-coupling alignment attribute offsets can also be used to perform similar operations using singular value decomposition and null space operations.
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Bendik, Jr. Joseph J.
Hunter, Jr. Robert O.
Smith Adlai H.
Litel Instruments
Young Christopher G
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