Method and apparatus for eliminating electric charges in a clean

Gas separation: processes – Electric or electrostatic field – And nonelectrical separation of fluid mixture

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553852, 95 69, 95 70, 96 52, 96 57, 96 74, B03C 301

Patent

active

052960188

ABSTRACT:
A method and apparatus for eliminating electric charges in a clean room is disclosed involving removing fine and superfine grains from air in the clean room, and generating ions in the thus purified air inside the room.

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