Method and apparatus for eliminating defects and improving...

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – With programmed – cyclic – or time responsive control

Reexamination Certificate

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C205S646000, C205S662000, C205S663000

Reexamination Certificate

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10638751

ABSTRACT:
A method of removing material from a conductive surface of a workpiece while the conductive surface and an electrode are wetted by a process solution. The method comprises the steps of applying power between the conductive surface and the electrode, rendering the conductive surface anodic. The method includes the step of allowing a passivation layer to build up on the conductive surface/The method includes the step of applying an external influence to the conductive surface to periodically reduce the passivation layer thickness. Advantages of the invention include an efficient technique for electropolishing a workpiece.

REFERENCES:
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patent: 6143155 (2000-11-01), Adams et al.
patent: 6315883 (2001-11-01), Mayer et al.
patent: 6328872 (2001-12-01), Talieh et al.
patent: 6395152 (2002-05-01), Wang
patent: 6440295 (2002-08-01), Wang
patent: 6811680 (2004-11-01), Chen et al.
patent: 2003/0168351 (2003-09-01), Basol

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