Gas separation: processes – Degasification of liquid
Patent
1997-04-18
1999-05-04
Bushey, C. Scott
Gas separation: processes
Degasification of liquid
95243, 95254, 96155, B01D 1900
Patent
active
059000457
ABSTRACT:
The present invention discloses a method and apparatus for eliminating air bubbles from a liquid dispensing line by utilizing an air bubble tank positioned and connected in fluid communication between a liquid reservoir and an electric pump for feeding the liquid. The air bubble tank cumulates air bubbles in an upper portion of the tank cavity and allows a liquid flow which is substantially free of air bubbles to be outputted from an outlet positioned adjacent to the bottom of the tank to a process machine, while the air bubbles are exhausted out of the tank on a predetermined frequency.
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Lu Shih-Hung
Wang Wen-Shyan
Bushey C. Scott
Taiwan Semiconductor Manufacturing Co.Ltd.
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