Method and apparatus for electronic device manufacture using...

Details Method and apparatus for electronic device manufacture using... Method and apparatus for electronic device manufacture using...

2010-02-01

2010-12-07

Smith, Zandra V. (Department: 2822)

Semiconductor device manufacturing: process

Miscellaneous

C438S689000, C216S012000, C134S002000, C257SE21532

Reissue Patent

active

RE041989

ABSTRACT:
Electronic devices are formed on a substrate that is advanced stepwise through a plurality of deposition vessels. Each deposition vessel includes a source of deposition material and has at least two shadow masks associated therewith. Each of the two masks is alternately positioned within the corresponding deposition vessel for patterning the deposition material onto the substrate through apertures in the mask positioned therein, and positioned in an adjacent cleaning vessel for mask cleaning. The patterning onto the substrate and the cleaning of at least one of the masks are performed concurrently.

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patent: 6281552 (2001-08-01), Kawasaki et al.
patent: 6821348 (2004-11-01), Baude et al.
patent: 2002/0009538 (2002-01-01), Arai
patent: 2003/0228715 (2003-12-01), Brody et al.
patent: 2005/0031783 (2005-02-01), Brody et al.

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