Method and apparatus for electron energy analysis

Details Method and apparatus for electron energy analysis Method and apparatus for electron energy analysis

1994-08-26

1995-11-07

Anderson, Bruce C.

Radiant energy

Electron energy analysis

H01J 3705

Patent

active

054649781

ABSTRACT:
An electron energy spectrometer having an electron energy analyzer equipped with plural detectors including a reference detector. The energy of electrons impinging on the reference detector is stepped in increments. The value of these increments can be set at will. The spectrometer has improved detection accuracy and improved detection sensitivity. The spectrometer irradiates the surface of a sample with an electron beam. The energy of the electron beam is swept. The intensities of electrons ejected from the sample surface are analyzed. This instrument utilizes the multidetector scheme. Data about the intensities of the electrons is collected. Interpolation calculations are performed at each value of the energy according to the collected data.

REFERENCES:
patent: 3914606 (1975-10-01), Hashimoto et al.
patent: 4593196 (1986-06-01), Yates
patent: 4758723 (1988-07-01), Wardell et al.
patent: 4959544 (1990-09-01), Sukenobu
patent: 5118941 (1992-06-01), Larson
patent: 5149966 (1992-09-01), Silari et al.

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