Method and apparatus for electrical testing of microwired struct

Details Method and apparatus for electrical testing of microwired struct Method and apparatus for electrical testing of microwired struct

1985-05-20

1986-12-09

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 52, 324 73PC, 250310, G01R 3102, G01R 3122, G06F 1132

Patent

active

046282580

ABSTRACT:
A method and an apparatus are provided for electrical testing of continuity in microwired structures in which at least one first circuit node is electrically charged with at least one first particle probe and at least one second circuit node is sensed with at least one second particle probe to determine whether it has an electrically conductive connection to at least one first circuit node. Such a method and such an apparatus should, with relatively simple structure, enable the charging at microwired structures to be measured in a tracking manner, a switching of the beam generator to various values of primary energy is avoided and all disadvantages connected with a secondary electron signal are suppressed. At least one second particle probe is deflected in the region of the electrical fields that extend from the at least one second circuit node. The potential at this second circuit node is qualitatively and quantitatively identified by way of the deflection of the second particle probe which thereby occurs.

REFERENCES:
patent: 4169244 (1979-09-01), Plows
patent: 4277679 (1981-07-01), Feuerbaum
patent: 4415851 (1983-11-01), Langner et al.
patent: 4417203 (1983-11-01), Pfeiffer et al.
patent: 4460866 (1984-07-01), Feuerbaum
patent: 4471302 (1984-09-01), Fazekas
patent: 4573008 (1986-02-01), Lischke
"Handbuch der Physik", vol. XXI, 1956, Springer-Verlag, Berlin-Gottingen-Heidelberg, pp. 254-256.

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