Method and apparatus for effecting selective ablation of a coati

Details Method and apparatus for effecting selective ablation of a coati Method and apparatus for effecting selective ablation of a coati

1989-09-28

1990-07-10

Albritton, C. L.

Electric heating

Metal heating

By arc

21912175, 21912179, 21912168, B23K 2600

Patent

active

049408810

ABSTRACT:
The angles of the walls of vias being ablated by excimer lasers are controlled by interposing refractive elements between the masks and the workpieces, and rotating the refractive elements about axes parallel to the optical axis. In one embodiment, the refractive element has parallel faces, and is inclined. In another embodiment, the faces of the refractive element are at a small angle to each other.

REFERENCES:
patent: 4780177 (1988-10-01), Wojnarowski et al.
patent: 4786358 (1988-11-01), Yamazaki et al.
patent: 4842677 (1989-06-01), Wojnarowski et al.
patent: 4861421 (1989-08-01), Bienstock
An article entitled, "Excimer Laser Etching of Polyimide", by J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns, and J. Kaufman, Journal of Applied Physics, vol. 58, No. 5, Sep. 1, 1985.

Affiliated with

Also associated with

Rating

Method and apparatus for effecting selective ablation of a coati does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for effecting selective ablation of a coati, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for effecting selective ablation of a coati will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1722469