Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-11-01
2005-11-01
Rodriguez, Paul (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S030000, C700S037000, C700S038000
Reexamination Certificate
active
06961636
ABSTRACT:
A method includes processing a plurality of workpieces in accordance with an operating recipe. Metrology data associated with the processing is collected. A control model including at least one tuning parameter having a default value is provided. A plurality of perturbations is introduced to shift the tuning parameter from its default value. Control actions are generated based on the metrology data and the perturbations to the tuning parameter in the control model to modify the operating recipe. An error signal associated with each of the perturbations is generated. The default value of the tuning parameter is modified based on the error signals.
REFERENCES:
patent: 5408405 (1995-04-01), Mozumder et al.
patent: 5926690 (1999-07-01), Toprac et al.
patent: 6161054 (2000-12-01), Rosenthal et al.
patent: 6263255 (2001-07-01), Tan et al.
patent: 6631299 (2003-10-01), Patel et al.
Montgomery, D. C. (2000),Design and Analysis of Experiments. Response Surface Methods, 5thedition, John Wiley & Sons, New York, 11-6.
Chong Robert J.
Pasadyn Alexander J.
Sonderman Thomas J.
Advanced Micro Devices , Inc.
Rodriguez Paul
Williams Morgan & Amerson
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