Measuring and testing – Probe or probe mounting
Patent
1995-03-28
1997-12-16
Noland, Thomas P.
Measuring and testing
Probe or probe mounting
73611, 73105, 250307, 374 45, G01D 2100, G01N 2500, G01N 3300, G01N 2300
Patent
active
056987986
ABSTRACT:
In a measuring method and a measuring apparatus which are suited for observing a dynamic physical phenomenon particularly in a microdevice, a signal for generating a physical phenomenon in a specimen is inputted to the specimen, and a signal which is caused by this dynamic physical phenomenon is detected by a probe which is close to or in contact with the specimen surface in correspondence with a signal input to the specimen on the basis of the specific time. The measuring apparatus has a scanning probe microscope with a probe (tip) which is close to or in contact with the specimen surface, a pulse voltage application control unit for applying respective pulse voltages to the specimen and probe, and a signal measuring unit for measuring a signal from the specimen detected by the probe. The measuring apparatus causes a dynamic physical phenomenon in the specimen by applying the pulse voltage to the specimen, applies a bias voltage between the probe and specimen by applying the pulse voltage to the probe, and detects the signal caused by the dynamic physical phenomenon in the specimen. Pulse voltage application to the probe is executed by the pulse voltage application control unit in correspondence with pulse voltage application to the specimen on the basis of the specific time. A dynamic physical phenomenon in a microarea of a specimen which is caused by the particle property or wave property of electrons can thus be observed.
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Hasegawa Tsuyoshi
Hosoki Shigeyuki
Katsuyama Toshio
Kohno Makiko
Yajima Yusuke
Hitachi , Ltd.
Noland Thomas P.
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