Method and apparatus for drying parts and microelectronic compon

Details Method and apparatus for drying parts and microelectronic compon Method and apparatus for drying parts and microelectronic compon

1995-06-07

1997-08-05

Look, Edward K.

Drying and gas or vapor contact with solids

Process

With contacting of material treated with solid or liquid agent

34352, F26B 500

Patent

active

056530455

ABSTRACT:
An apparatus and method for drying single or multiple parts or objects wherein the apparatus uses a drying chamber for containing said object or objects, said drying chamber having a closeable entryway for providing access to said drying chamber, the use of a sonic head disposed in said drying chamber attached to a source of drying liquid and an adjustable supply and drain attached to said drying chamber for introducing and removing said drying fluid to and from said drying chamber.

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