Abrading – Machine – Combined
Patent
1996-12-16
1999-03-23
Eley, Timohy V.
Abrading
Machine
Combined
451285, 451287, B24B 500, B24B 2900, B24B 700, B24B 900
Patent
active
058851380
ABSTRACT:
A polishing apparatus includes an arrangement of a plurality of units to deal with various operations and a robot having at least one arm. The plurality of units are disposed around the robot and include a loading unit for receiving thereon a, e.g. dry, workpiece to be polished, a polishing system including at least one polishing unit for polishing the workpiece, a washing system and a drying system at least one washing unit for washing and drying the polished workpiece, and an unloading unit for receiving thereon a resultant clean and dry polished workpiece.
REFERENCES:
patent: 4141180 (1979-02-01), Gill, Jr. et al.
patent: 5213118 (1993-05-01), Kamikawa
patent: 5329732 (1994-07-01), Karlsrud et al.
patent: 5333413 (1994-08-01), Hashimoto
patent: 5361545 (1994-11-01), Nakamura
patent: 5421768 (1995-06-01), Fujiwara et al.
patent: 5456627 (1995-10-01), Jackson et al.
patent: 5498294 (1996-03-01), Matsushita et al.
patent: 5518542 (1996-05-01), Matsukawa et al.
patent: 5616063 (1997-04-01), Okumura et al.
patent: 5618227 (1997-04-01), Tsutsumi et al.
patent: 5655954 (1997-08-01), Oishi et al.
Aoki Riichirou
Ishikawa Seiji
Okumura Katsuya
Tsujimura Manabu
Yajima Hiromi
Banks Derris H.
Ebara Corporation
Eley Timohy V.
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