Abrading – Machine – Sandblast
Reexamination Certificate
2005-06-14
2005-06-14
Hail, III, Joseph J. (Department: 3723)
Abrading
Machine
Sandblast
C451S003000, C451S006000, C451S008000, C451S041000, C451S286000, C451S287000, C451S288000, C451S443000, C451S444000
Reexamination Certificate
active
06905400
ABSTRACT:
A polishing cloth mounted on a turntable is dressed by bringing a dresser in contact with the polishing cloth for restoring the polishing capability of the polishing cloth. The dressing is performed by measuring heights of a surface of the polishing cloth at radial positions of the polishing cloth in a radial direction thereof determining a rotational speed of the dresser with respect to a rotational speed of the turntable on the basis of the measured heights, and dressing the polishing cloth by pressing the dresser are rotating. The dresser has an annular diamond grain layer or an annular SiC layer.
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Ishii You
Kawamoto Takayoshi
Kimura Norio
Nishi Toyomi
Sakurai Takeshi
Ebara Corporation
Hail III Joseph J.
McDonald Shantese L.
Wenderoth , Lind & Ponack, L.L.P.
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