Method and apparatus for distributing a polishing agent onto a p

Details Method and apparatus for distributing a polishing agent onto a p Method and apparatus for distributing a polishing agent onto a p

1997-06-04

1999-07-13

Morgan, Eileen P.

Abrading

Abrading process

Abradant supplying

451 41, 451 36, 451287, 451446, B24B 722

Patent

active

059218495

ABSTRACT:
An apparatus for evenly polishing or planarizing the surfaces of workpieces includes a distributor with a reservoir and a plurality of conduits for uniformly guiding a fluid across a surface of a polishing material. The apparatus is configured to couple to a polishing machine that processes surfaces of workpieces such as semiconductor wafers and computer discs. The reservoir receives a fluid from an exterior source and the fluid is pooled in the reservoir before passing down the conduits to the polishing material. When multiple conduits are employed, the conduits are evenly spaced around the distributor to facilitate uniform application of fluid to a number of locations on the polishing material.

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