Method and apparatus for dimension measurement and inspection of

Details Method and apparatus for dimension measurement and inspection of Method and apparatus for dimension measurement and inspection of

1998-11-10

2000-07-25

Young, Christopher G.

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

430296, 382145, G03F 900

Patent

active

06093512&

ABSTRACT:
The invention relates to a method and apparatus for dimension measurement and inspection of structures having a high aspect ratio, wherein a corpuscular beam is directed onto an interesting feature of the structure and backscattered corpuscles and/or secondary corpuscles released by the corpuscular beam are detected and evaluated. To increase the detection efficiency surroundings of the interesting feature are removed before measurement and inspection thereof.

REFERENCES:
patent: 5741614 (1998-04-01), McCoy et al.

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