Electric heating – Metal heating – By arc
Patent
1991-11-13
1993-05-25
Albritton, C. L.
Electric heating
Metal heating
By arc
21912183, B23K 2600
Patent
active
052142612
ABSTRACT:
Method and apparatus for using deep ultraviolet excimer laser beams to dice semiconductor substrates, such as sapphire, with or without integrated circuitry, by establishing guided relative motion between the beam and the substrate to achieve ablative photodecomposition with the angle between the beam and the substrate being approximately five (5) degrees out of normal.
REFERENCES:
patent: 4224101 (1980-06-01), Tijburg et al.
patent: 5075201 (1991-12-01), Koh
Albritton C. L.
Caldwell Wilfred G.
Hamann H. Fredrick
Montanye George A.
Rockwell International Corporation
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