Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1991-04-23
1992-08-11
Nguyen, Vinh
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 713, 324 731, 324158R, 324537, 437 8, 250310, G01R 3126, G01N 2300
Patent
active
051382563
ABSTRACT:
A method and apparatus for determining the thickness of an interfacial oxide film intermediate to a polysilicon layer of a first conductivity type and a silicon substrate of a second conductivity type supporting a p-n junction. Radiant energy, preferably in the form of light, is directed on to the top surface of the polysilicon layer thereby stimulating carriers which concentrate at the interfacial oxide film, allowing the excited carriers to diffuse across the oxide film, and creating a short circuit, the magnitude of which is inversely related to the thickness of the interfacial oxide film.
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Murphy Richard J.
Schick Jerome D.
Wilson Howard R.
Brandt Jeffrey L.
Huberfeld Harold
International Business Machines Corp.
Nguyen Vinh
Schnurmann H. Daniel
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