Optics: measuring and testing – For optical fiber or waveguide inspection
Patent
1975-10-03
1977-09-20
McGraw, Vincent P.
Optics: measuring and testing
For optical fiber or waveguide inspection
118 9, 250575, 356 85, 356201, 427 10, G01N 2100, B05C 1100
Patent
active
040493520
ABSTRACT:
A method of determining the rate of flow of particles in a vacuum deposition device, using the relationship that the rate of flow of the particles is equal to the density of the particle current times the mean velocity of the particles, comprises establishing a flow or current of particles in the device and directing a laser beam through the current of particles in order to measure the atteunation of the beam after it has passed through the particles and thus to determine the vapor density within the current. The absorption wavelength shift of the laser beam provides an indication of the velocity component of the current because the shift is produced by a Doppler effect by the velocity component of the particle current in the direction of flow from the source of the particles to the substrate to be coated. In a preferred embodiment of the method, a housing has a vacuum chamber in which the substrate to be coated is held in a position across the chamber from a source of the coating material which is evaporated or sputtered so that a current of particles moves from the source across the chamber to the substrate. At least one laser beam is directed through the particles and is picked up on the opposite side by a detector which is capable of measuring the absorption wavelength shift. Two laser beams may be directed through the particle stream, including one transverse to the current direction and one parallel to the current direction. The second beam may be provided by using a semi-transparent mirror to deflect the original laser beam so that it is passed through the chamber again in a direction at substantially right angles to the first beam direction.
REFERENCES:
patent: 3654109 (1972-04-01), Hohl et al.
patent: 3734620 (1973-05-01), Cade
patent: 3817622 (1974-06-01), Billman et al.
Lardon Marcel
Pulker Hans
Balzers Patent und Beteiligungs AG
McGraw Vincent P.
LandOfFree
Method and apparatus for determining the rate of flow of particl does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for determining the rate of flow of particl, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for determining the rate of flow of particl will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-668607