Radiant energy – Photocells; circuits and apparatus – Combined with diverse-type device
Patent
1990-11-21
1993-01-05
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Combined with diverse-type device
324158P, H01J 4014
Patent
active
051773511
ABSTRACT:
A device for measuring photoinduced electrical properties at a semiconductor sample surface. The device includes an analysis probe having a means for directing a light beam to a defined portion of a semiconductor substrate surface. A probe electrode is provided for detecting a photo-induced electrical signal from the defined portion of the semiconductor substrate, and a light blocking means is carried by the probe for substantially blocking stray light from the defined portion of the substrate surface. A positioning means for positioning the semiconductor and device with respect to each other for measurement of the photo-induced electrical property at a desired defined portion of the semiconductor substrate surface. The positioning means may be adapted to position respectively the wafer and probe without contact between the wafer and probe and to position the wafer with respect to a chuck without contacting the chuck.
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