Method and apparatus for determining the average size of apertur

Details Method and apparatus for determining the average size of apertur Method and apparatus for determining the average size of apertur

1974-10-04

1976-05-04

Corbin, John K.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

356 71, 356111, 356159, 250571, G01B 902

Patent

active

039543374

ABSTRACT:
The average aperture width in a small area of an apertured member, such as a shadow mask for a cathode-ray tube, is determined by passing a beam of substantially monochromatic light through an area of the member to form an interference pattern, detecting the intensities of at least two light fringes of the interference pattern, generating electrical signals which are representative of the detected intensities and then deriving the average width of apertures in the lit area of the member from the generated signals.

REFERENCES:
patent: 3709610 (1973-01-01), Kruegle
Watkins, L. S., "Inspection of Integrated Circuit Photomasks with Intensity Spatial Filters;" Proc. of the IEEE, Vol. 57, No. 9, 9/69.

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